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  1. plasma source - e-beam evaporator - atomic hydrogen source - sputter gun - vacuum - thin films - electron beam evaporator - UHV - MBE - from tectra GmbH ...

    plasma source - e-beam evaporator - atomic hydrogen source - sputter gun - vacuum - thin films - electron beam evaporator - UHV - MBE - from tectra GmbH ...
    Mini-Coater0

    www.tectra-gmbh.com - 2009-02-13

e-beam evaporator1 electron optics1 electron beam evaporator1 ion optics1 design7 cathode1 evaporation source1 ion gun1 leed2 compound2 green4 green building2 effusion source1 elektronenstrahlverdampfer1

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